Photoresist is a rotation speed of 2000 rpm was coated, 110 ℃ photomask for 60 seconds after dry (photomask) putting a 50 mj/cm2 exposure to the light treatment.
Photo resistor 2000 rpm rotation speed coating and 110℃ after dry for 60 seconds in photomask (Photomask) putting on 50 m J/cm 2, from light exposure process.
Photo registers coated with 2000 RPM rotational speed, and for 60 seconds at 110 degrees Centigrade C dry after the photo mask (Photomask) Cover 50 mJ/cm 2 in light of the optical processing.